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Reactive Ion Etching (RIE) System

Deadline:01 Dec 2025, 12:00 CET

Tender information

DE_BKMS

Garching, Germany

Type
goods (tender)
Procedure
Open
Ref. number
b81ac4f7-d6d9-4257-8011-95ee9a1d6091
CPV
38000000

The Walther-Meißner-Institut (WMI) will acquire a Reactive Ion Etching (RIE) System for the fabrication of superconducting quantum circuits. This requires the ability to run a variety and combination of etching processes

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